Photolithography is one of the important processes in the production of integrated circuits (ICs or chips). Simply say, it is the process of copying a circuit pattern on a substrate by using the photomask and photoresist.
The substrate will be painted on silicon dioxide insulating layer and photoresist. The photoresist can be dissolved easily with a developer after being exposed to UV light, after dissolver and etched, the circuit pattern will be left on the substrate.
Photoresist is combined with resins, solvents and additives. The light sensitive range of photoresist is 200nm-500nm. Therefore, many semiconductors laboratory will adopt yellow light which blocks off 500nm UV wavelength to prevent the photoresist overexposed or prematurely exposed situations.
BEST’s special T8 LED retrofit LED tubes are specially designed for semiconductor laboratories and lithography. Industrial Technology Research Institute in Taiwan has proved that the BEST’s T8 LED yellow tube can filter 500nm UV wavelength so that the photoresist will not be affected by surrounded lighting factors.
Such as Integrated circuits, panel displays, museums, libraries, printing industry, lithography laboratories and other places with photosensitive element materials, etc.
↑National laboratory spectrum report of T8 LED yellow tube.
You can find the measurement report from Industrial Technology Research Institute in Taiwan here in the below link:
Photolithography No UV T8 4F yellow LED tube report:
https://www.best-energysaving-tech.com/en/news/N2022033100001/news_detail.html
Clean room luminaire catalogue:
https://www.best-energysaving-tech.com/en/news/N2022030100001/news_detail.html
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